Main Features
The furnace body is specially designed for high temperature process (900~1100 ℃), which can effectively prevent the deformation of the furnace body and prolong the service life of the furnace body;
 Rapid cooling furnace body: The latest patented technology makes the furnace body temperature drop to the required temperature quickly, the cooling rate is increased by more than 25%, and the temperature uniformity in the furnace tube is obviously improved;
Advanced cascade temperature control and intelligent cooling technology, improve temperature stability and temperature control accuracy, and reduce temperature setting time;
The advanced fully closed-loop pressure control system can accurately detect and control the air pressure in the process chamber in real time;
Efficient exhaust gas treatment system, dry and wet separation, automatic discharge, greatly extend the maintenance cycle, reduce maintenance costs, and ensure the operating rate and process stability;
Innovative non-landing process method, the quartz boat is suspended during the process, which can effectively reduce the stress and deformation of the quartz tube, reduce the stickiness between the quartz devices, and prolong the service life;
The unique furnace door sealing design realizes the isolation of the metal and the reaction chamber, reduces heat loss, greatly prolongs the service life of the sealing ring, and ensures the stability of the pressure;
Stable source piping design reduces square resistance fluctuation caused by disturbance of environmental factors;
MES/CCRM system with complete architecture and outstanding performance.


 

Main Parameters

Item	Technical Parameter
Process Method	Closed tube low pressure diffusion
Effective inner diameter of reaction tube	Ø430mm
Loading capacity	Vertical loading method：1600pcs/batch (166mm), 1400pcs/batch (182mm), 1200pcs/batch (210mm), 1200pcs/batch (230mm) Horizontal loading method: 2600 tablets/batch (166mm), 2000 tablets/batch (182mm), 1800 tablets/batch (210mm), 1600 tablets/batch (230mm)
Square resistance and uniformity	Intra-chip≤5% Inter-chip≤5% Lot-to-batch≤3% ( 50~110ohm/sq )
heating temperature	Rt 1250°C
range of working temperature	600 ~ 1100°C
Temperature Control	6-point temperature control, internal and external dual-mode control
Heating method	Automatic slope heating and fast constant temperature function
Cooling method	The latest patented technology, 6 temperature zone section control active cooling furnace body
Maximum cooling rate	≥7℃/min （1100~900 ℃），≥6℃/min（900~700 ℃）
Accuracy and length of constant temperature zone	≤±0 . 5 ℃/2200m m （600 ~ 1 100℃）
Single point temperature stability	≤±0.5℃/4h（880℃）
Feeding method	Adopt SiC cantilever propeller to automatically feed the film horizontally, the boat speed is continuously adjustable from 20 to 1000mm/min; the positioning accuracy is ≤±1 mm;
The ultimate vacuum of the system	20mbar
System air leak rate	The rate of pressure rise after the pump is stopped and the valve is closed：＜ 2 mbar /min .
Pressure control method	Closed loop fully automatic
Process control method	Fully automatic, PLC + industrial computer, touch screen operation
Human-computer interface	LCD display, touch operation, process editing, online monitoring, authority management, team management, networking function
MES	optional