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1. Designed for semiconductor wafer ID marking, compatible with 6-inch and 8-inch wafers
2. Suitable for mainstream wafer materials: Si, GaAs, SiC
3. Fully automatic operation, equipped with FFU filter module
4. Equipped with dual-arm robot; SMIF loading module optional
5. Compliant with SEMI standards, supports SECS/GEM communication protocol
Mainly used for ID marking on 12-inch and smaller wafers made of Si, GaAs, SiC, EMC, solder mask and other materials.