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LED Laser Lift-off Equipment

LED Laser Lift-off Equipment

Machine Features

1. Long depth‑of‑focus to cope with wafer warpage

2. High‑precision processing system

3. Fully automatic loading and unloading for high speed processing

4. Low‑damage machining and high yield

5. Real‑time adjustment and storage of process‑parameters are supported.


Applications

Laser lift‑off processing for flat substrates of silicon‑base or metal, and DPSS wafers.


LED Industry
Technical Data Sheet

Machine   Model

Led   Laser Lift-off Equipment

Workpiece Size

4/6 inch   Wafer

Processing Speed

2400~3200mm/s

Processing Accuracy

±1.5μm

Stage

400*600mm

Laser Frequency

200khz

Tact Time

140s (4-Inch Wafer, Excluding   Loading/Unloading)

Equipment Utilization Rate

98%

Mean Time Between Critical Failures (MTBCF)

≥ 2   Hours

Production Yield

95%

Galvo & Control System

Max. Speed:  5000mm/S
  Accuracy:±10μm

Processing   Mode

Spiral   Inward + Circular Linear Filling


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