Features：
1、Adopt Han‘s brand U-type linear motor and ACS high-performance control system;
2.、The base and beam are made of marble, fixed gantry structure, strong load capacity and good stability;
3、It is uitable for precision inspection, printing plat
| Stage Performance | ||
| Parameter | X-axis (Lower axis) | Y-axis (crossbeam axis) |
| Stroke (mm) | 2700 | 2850 |
| Max.velocity (m/s) | 1 | 1 |
| Acceleration (g) | 0.4 | 0.4 |
| Repeat accuracy(μm) | ±0.75um | ±1.15um |
| PositionaI accuracy (μm) | ±2um/1.5m | ±2um/1.5m |
| Velocity fluctuation | ＜0.3% | ＜0.3% |
| Acceleration and deceleration vibration | Smooth without vibration | Smooth without vibration |
| Horizontal straightness (μm) | 7.7 | 7.53 |
| Vertical straightness (μm) | 7.07 | 6.96 |
| Load (kg) | 100 | 140 |
| X-Y Verticality (mm) | 0.01 | |
Sample
