Online Ar Plasma Cleaning Machine
Online Ar Plasma Cleaning Machine
Brief Description
Temperature of plasma 38 ℃, no damage to chip and its thin film
Strong clean ability; comparable with vacuum plasma clean machine
Self-made key component, highly cost-effective
service life of plasma head is permanent
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       Equipment Parameters           
 

Model

Ar-P500 Plasma

Power supply

AC220V,50Hz

Power 

1000W(Max)/13.56MHZ

Processing width

20mm-3000mm(Optional)

Processing height

1mm-3mm(Max)

Processing speed

0-5m/min

Gas

AR or AR+O2

Sample
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