Temperature of plasma 38 ℃, no damage to chip and its thin film
Strong clean ability; comparable with vacuum plasma clean machine
Self-made key component, highly cost-effective
service life of plasma head is permanent
Equipment Parameters
|
Model |
Ar-P500 Plasma |
|
Power supply |
AC220V，50Hz |
|
Power |
1000W（Max）/13.56MHZ |
|
Processing width |
20mm-3000mm（Optional) |
|
Processing height |
1mm-3mm（Max） |
|
Processing speed |
0-5m/min |
|
Gas |
AR or AR+O2 |
Sample
